Ultra-compact and highly precise

Miniaturization and automation are constantly advancing in high-end applications in semiconductor technology, electronics or research and development. Positioning and drive systems must work precisely, cleanly, reliably and with little maintenance under extreme environmental conditions. Feinmess Suhl GmbH, which belongs to the Steinmeyer Group, develops compact, robust and durable miniature slide screw drives that can be adapted to customer requirements.

When parts, components or assemblies are used in demanding environments such as vacuum, extremely dry air or nitrogen, noble gas atmosphere or clean room, special know-how is required when selecting materials. The slide screw drives in Suhl are optionally made from brass, steel or stainless steel or even plastic - special coatings, lubricants or lubricant-free operation are also possible.

PEEK & stainless steel

In demanding applications in the semiconductor industry (HV, DUV, EUV), the combination of a non-rusting stainless steel spindle with a PEEK nut has proven itself. "In ultra-dry nitrogen or high vacuum, good sliding properties and minimal particle formation are required," explains development manager Detlef Rode. "Our high-performance plastic is enriched with lubricating fillers, has low outgassing values ​​and is therefore a sensible alternative to greases or oils." With the innovative material pairing, optimal sliding properties, reduced friction and heat dissipation as well as high mechanical stability and durability can be achieved without additional lubricants. The system is also ideal for dry running up to clean room class ISO3 and 10E-9 mbar.

Ultra-compact and highly precise

"With a spindle diameter of just 3 mm and a length of 112 mm, our ultra-compact slide screw drives are among the smallest on the market," Rode continues. They achieve an accuracy of up to ISO tolerance class 3 - class 1 is also possible on request - and can be used in a temperature range of -196° C to 140° C. "Such precision in this size is unique and cannot be achieved with ball screws running dry." In addition, the robust sliding screw drives offer a simple structure, self-locking, high rigidity and exact shape and dimensional stability.

Assemblies according to customer requirements

The spindle of the sliding screw drives is rolled. This chipless process produces a high surface quality through cold forming. At the Suhl location, Steinmeyer produces various thread types, sizes, directions and thread numbers with a pitch of ≥ 0.1 mm and a stroke of up to 300 mm upon customer request. The manufacturer also offers nut variants with a wide range of options in terms of design, preload or play.