Positioning with nanometer precision

On the way to ever more accurate and flexible systems ITK now offers for the positioning systems of the PT15 series series for particularly demanding positioning tasks down to the nanometer range.

PT15 positioning system: modular, reliable, accurate

Gantry and microscope stages form the foundation of all positioning systems from ITK. The gantry stages of the PT15 series, designed in classic gantry construction, are intended for the dynamic positioning of relatively light inspection sensors, workpieces and specimens. Thereby the fields of application are manifold: whether for wafer inspection, for material examination or in classical metrology. The very stable gantry structure with granite base ensures the highest permanent stability and repeatability. They owe their high dynamics in particular to the direct drive developed in-house by linear motors in the X, Y, Z directions with reduced heat generation. High positioning accuracy is ensured by the use of robust and highly precise MR-based length measuring systems. Even when used under difficult conditions - for example in the water bath of ultrasonic testing – the systems function in 24/7 operation.

Available in various basic versions, the products of the PT15 series cover applications for the inspection of small dimensions under the microscope up to scanning systems with up to 4 square meters of working area and up to eight active positioning axes. Thanks to the modular design, each system is precisely matched to individual process requirements and can be optionally expanded with various Z-axis modules including dual or quadruple Z adjustment.